Ulvac GM-2002 Capacitance Manometer

The ULVAC GM-2002 is a high-precision capacitance diaphragm gauge designed for stable and accurate pressure measurement in vacuum applications. It is well-suited for use in semiconductor processing, vacuum coating, and laboratory systems requiring fine pressure control. Measurement Range: 0–1000 Torr (full scale) Sensor Type: Capacitance manometer with metal or ceramic diaphragm Supply Voltage: 24 VDC Signal Output: 0–10 VDC linear analog Accuracy: ±0.5% of full scale (typical) Repeatability: ±0.1% of reading Zero Drift: ±0.5% FS/month (typical) Response Time: ≤20 ms (electronic), ≤200 ms (total with gas damping) Process Connection: NW/KF 16 or NW 25 flange (model-dependent) Electrical Connection: 9-pin D-sub connector (ULVAC standard) Operating Temperature: 5°C to 45°C Storage Temperature: –20°C to 60°C Mounting Orientation: Any (orientation-independent design) Material of Wetted Parts: Corrosion-resistant stainless steel and ceramics Application: Vacuum control and monitoring in etching, CVD, PVD, and other high-precision vacuum processes Manufacturer: ULVAC, Inc. (Made in Japan) Please review pictures carefully and let us know if you have any questions!

Condition: Used

Weight:   0.90

Depth:   4.00

Length:   8.00

Width:   10.00

SKU:   18967 4.S9.15.5