SMC XLAV-40G-5HZ High Vacuum Valve

The SMC XLAV-40G-5HZ is a high vacuum angle valve designed for use in semiconductor, analytical, and vacuum processing equipment. It provides reliable sealing and control of vacuum flow in high-purity and low-leakage applications.

Model: XLAV-40G-5HZ
Manufacturer: SMC Corporation
Type: High Vacuum Angle Valve
Valve Size: 40 mm port diameter
Actuation Type: Pneumatic, normally closed
Seal Type: Bellows seal (leak-tight construction)
Body Material: Aluminum alloy with anodized or coated finish
Mounting: Flange (typically KF40 or equivalent)
Operating Pressure: Vacuum to atmospheric pressure
Leak Rate: ≤ 1.3 × 10⁻⁹ Pa·m³/s
Ambient and Fluid Temperature: 5°C to 60°C
Application: Semiconductor tools, vacuum chambers, thin-film processes, leak testing systems Please review pictures carefully and let us know if you have any questions!