Balzers EVR3 Electron Beam Evaporation Control Unit

The Balzers EVR3 is an electron beam evaporation control unit used in vacuum coating systems. It provides precise control over e-beam power and beam deflection for thin film deposition processes in high- and ultra-high-vacuum environments, particularly in optical and semiconductor applications. Technical Specifications: Model: EVR3 Type: Electron Beam Evaporation Control Unit Application: Power and trajectory control for e-beam sources in vacuum deposition Beam Power Control: • Output Power Range: Typically 3 kW to 10 kW (system-dependent) • Adjustable via analog or digital interface Control Functions: • Beam deflection (XY axis steering) • Filament heating control • High-voltage supply regulation • Crucible indexing and position control Input Voltage: 3-phase AC (usually 400 V, model-dependent) Output Voltage (Beam): Up to ~10 kV Current Range: Up to ~1 A beam current (varies by application) Interfaces: • Analog control signals • TTL/digital I/O for interlocks and process integration Cooling: Forced air or liquid cooling (depending on power rating) User Interface: Local control panel or remote control via system integration Compatibility: Designed to interface with Balzers e-beam guns and deposition systems Dimensions & Mounting: Rack-mountable industrial housing